Inventor · Newark, CA, US

Kenneth Lucchesi

12Patents

5h-index

9Co-inventors

51Inventor score

Filing activity: Oct 8, 2015 → Jul 22, 2020

Most-cited inventions

Patent	Title	Area	Cited by	Status
US9852889B1	Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring	Electricity	105	Active
US10115568B2	Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring	Electricity	47	Active
US9761414B2	Uniformity control circuit for use within an impedance matching circuit	Electricity	30	Active
US10283330B2	Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators	Electricity	5	Active
US10615003B2	Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring	Electricity	5	Active
US10002746B1	Multi regime plasma wafer processing to increase directionality of ions	Electricity	4	Active
US11195706B2	Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators	Electricity	3	Active
US10115564B2	Uniformity control circuit for use within an impedance matching circuit	Electricity	2	Active
US10304662B2	Multi regime plasma wafer processing to increase directionality of ions	Electricity	2	Active
US10916409B2	Active control of radial etch uniformity	Electricity	0	Active
US10825656B2	Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring	Electricity	0	Active
US11935730B2	Systems and methods for cleaning an edge ring pocket	Electricity	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.