Inventor · Billerica, MA, US

Kenneth Steeples

6Patents
3h-index
3Co-inventors
50Inventor score

Filing activity: Feb 13, 1979 → Mar 14, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US4290825A Semiconductor devices containing protons and deuterons implanted regions Electricity 15 Expired
US4394180A Method of forming high resistivity regions in GaAs by deuteron implantation Emerging Cross-Sectional Technologies 8 Expired
US6911350B2 Real-time in-line testing of semiconductor wafers Electricity 7 Expired
US7119569B2 Real-time in-line testing of semiconductor wafers Physics 2 Expired
US7403023B2 Apparatus and method of measuring defects in an ion implanted wafer by heating the wafer to a treatment temperature and time to substantially stabilize interstitial defect migration while leaving the vacancy defects substantially unaltered. Electricity 2 Expired
US7160742B2 Methods for integrated implant monitoring Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.