Klaus Petry
17Patents
4h-index
30Co-inventors
60Inventor score
Filing activity: Jul 20, 1995 → Feb 21, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5695396A | Ventilating system for reducing contaminations in the air of an aircraft | Emerging Cross-Sectional Technologies | 46 | Expired |
| US5545084A | Method and apparatus for air conditioning two passenger decks of an aircraft | Emerging Cross-Sectional Technologies | 32 | Expired |
| US6992309B1 | Ion beam measurement systems and methods for ion implant dose and uniformity control | Electricity | 22 | Expired |
| US6552892B2 | Method and apparatus for the grounding of process wafers by the use of conductive regions created by ion implantation into the surface of an electrostatic clamp | Electricity | 8 | Expired |
| US7381969B2 | Load lock control | Emerging Cross-Sectional Technologies | 4 | Active |
| US8722431B2 | FinFET device fabrication using thermal implantation | Electricity | 4 | Active |
| US9933314B2 | Semiconductor workpiece temperature measurement system | Electricity | 2 | Active |
| US8592786B2 | Platen clamping surface monitoring | Electricity | 2 | Active |
| US7828504B2 | Combination load lock for handling workpieces | Electricity | 2 | Active |
| US8531814B2 | Removal of charge between a substrate and an electrostatic clamp | Emerging Cross-Sectional Technologies | 1 | Active |
| US8766209B2 | Current limiter for high voltage power supply used with ion implantation system | Electricity | 0 | Active |
| US9029683B2 | Self-contained, multi-fluid energy conversion and management system for converting solar energy to electric and thermal energy | Emerging Cross-Sectional Technologies | 0 | Active |
| US10770261B2 | System and method to monitor glitch energy | Electricity | 0 | Active |
| US10739208B2 | Semiconductor workpiece temperature measurement system | Electricity | 0 | Active |
| US7105840B2 | Ion source for use in an ion implanter | Electricity | 0 | Expired |
| US9103564B2 | Solar energy converter and method for converting solar energy | Emerging Cross-Sectional Technologies | 0 | Active |
| US8987639B2 | Electrostatic chuck with radiative heating | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.