Kota Umezawa
11Patents
5h-index
18Co-inventors
59Inventor score
Filing activity: May 1, 2001 → Jan 28, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7964241B2 | Film formation method and apparatus for semiconductor process | Chemistry; Metallurgy | 72 | Active |
| US6599845B2 | Oxidizing method and oxidation system | Electricity | 14 | Expired |
| US7419550B2 | Oxidizing method and oxidizing unit of object for object to be processed | Electricity | 7 | Expired |
| US7129186B2 | Oxidation method and oxidation system | Electricity | 5 | Expired |
| US7208428B2 | Method and apparatus for treating article to be treated | Electricity | 5 | Expired |
| US7674724B2 | Oxidizing method and oxidizing unit for object to be processed | Electricity | 4 | Active |
| US7605095B2 | Heat processing method and apparatus for semiconductor process | Electricity | 4 | Active |
| US7981809B2 | Film formation method and apparatus for semiconductor process | Electricity | 3 | Active |
| US7452826B2 | Oxidation method and oxidation system | Electricity | 1 | Active |
| US9966258B2 | Method of growing gallium nitride-based crystal and heat treatment apparatus | Electricity | 0 | Active |
| US8183158B2 | Semiconductor processing apparatus and method for using same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.