Inventor · Fremont, CA, US

Li Wu

9Patents
4h-index
30Co-inventors
57Inventor score

Filing activity: Sep 30, 1998 → Dec 28, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6432479B1 Method for in-situ, post deposition surface passivation of a chemical vapor deposited film Electricity 362 Expired
US6242347A Method for cleaning a process chamber Emerging Cross-Sectional Technologies 14 Expired
US6468136B1 Tungsten CMP with improved alignment mark integrity, reduced edge residue, and reduced retainer ring notching Performing Operations; Transporting 12 Expired
US6221174A Method of performing titanium/titanium nitride integration Electricity 6 Expired
US6482746B2 Computer readable medium for controlling a method of cleaning a process chamber Emerging Cross-Sectional Technologies 2 Expired
US11848218B2 Semiconductor chamber component cleaning systems Electricity 0 Active
US11947219B2 Backlight module and curved display device Physics 0 Active
US11953718B2 Display apparatus and display method Physics 0 Active
US12327738B2 Integrated semiconductor part cleaning system Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.