Inventor · Fremont, CA, US

Luc Albarede

19Patents
5h-index
19Co-inventors
59Inventor score

Filing activity: Dec 12, 2008 → Dec 10, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US9337000B2 Control of impedance of RF return path Electricity 26 Active
US9401264B2 Control of impedance of RF delivery path Electricity 14 Active
US10134569B1 Method and apparatus for real-time monitoring of plasma chamber wall condition Physics 13 Active
US10249476B2 Control of impedance of RF return path Electricity 9 Active
US9119283B2 Chamber matching for power control mode Electricity 7 Active
US10157730B2 Control of impedance of RF delivery path Electricity 5 Active
US8473089B2 Methods and apparatus for predictive preventive maintenance of processing chambers Electricity 4 Active
US9735069B2 Method and apparatus for determining process rate Electricity 4 Active
US9107284B2 Chamber matching using voltage control mode Electricity 2 Active
US10302553B2 Gas exhaust by-product measurement system Electricity 2 Active
US10903050B2 Endpoint sensor based control including adjustment of an edge ring parameter for each substrate processed to maintain etch rate uniformity Electricity 2 Active
US8618807B2 Arrangement for identifying uncontrolled events at the process module level and methods thereof Physics 1 Active
US8164353B2 RF-biased capacitively-coupled electrostatic (RFB-CCE) probe arrangement for characterizing a film in a plasma processing chamber Emerging Cross-Sectional Technologies 1 Active
US10504704B2 Plasma etching systems and methods using empirical mode decomposition Electricity 0 Active
US9548189B2 Plasma etching systems and methods using empirical mode decomposition Electricity 0 Active
US10930478B2 Apparatus with optical cavity for determining process rate Electricity 0 Active
US10784174B2 Method and apparatus for determining etch process parameters Electricity 0 Active
US11056322B2 Method and apparatus for determining process rate Electricity 0 Active
US8894804B2 Plasma unconfinement sensor and methods thereof Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.