Maik Haeberlen
4Patents
2h-index
8Co-inventors
33Inventor score
Filing activity: Jan 21, 2009 → Jan 15, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10283356B2 | Semiconductor wafer comprising a monocrystalline group-IIIA nitride layer | Electricity | 4 | Active |
| US8492243B2 | Method for the production of a semiconductor structure | Electricity | 3 | Active |
| US8383495B2 | Semiconductor layer structure and method for fabricating a semiconductor layer structure | Electricity | 2 | Active |
| US9828692B2 | Apparatus and process for producing a single crystal of silicon | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.