Mani Subramani
6Patents
4h-index
9Co-inventors
50Inventor score
Filing activity: Oct 8, 1996 → Jun 3, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6368469B1 | Coils for generating a plasma and for sputtering | Electricity | 28 | Expired |
| US6254737A | Active shield for generating a plasma for sputtering | Electricity | 13 | Expired |
| US6783639B2 | Coils for generating a plasma and for sputtering | Electricity | 12 | Expired |
| US8398832B2 | Coils for generating a plasma and for sputtering | Electricity | 5 | Active |
| US11037764B2 | Modular microwave source with local Lorentz force | Electricity | 2 | Active |
| US11721532B2 | Modular microwave source with local lorentz force | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.