Mark Harless
15Patents
5h-index
14Co-inventors
59Inventor score
Filing activity: Jul 13, 1999 → Apr 7, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6324298A | Automated wafer defect inspection system and a process of performing such inspection | Electricity | 186 | Expired |
| US6937753B1 | Automated wafer defect inspection system and a process of performing such inspection | Electricity | 55 | Expired |
| US7729528B2 | Automated wafer defect inspection system and a process of performing such inspection | Electricity | 25 | Active |
| US6826298B1 | Automated wafer defect inspection system and a process of performing such inspection | Electricity | 21 | Expired |
| US7196300B2 | Dynamic focusing method and apparatus | Physics | 7 | Expired |
| US7340087B2 | Edge inspection | Physics | 5 | Expired |
| US7170075B2 | Inspection tool with a 3D point sensor to develop a focus map | Physics | 5 | Expired |
| US7703823B2 | Wafer holding mechanism | Emerging Cross-Sectional Technologies | 4 | Active |
| US8130372B2 | Wafer holding mechanism | Emerging Cross-Sectional Technologies | 3 | Active |
| US7629993B2 | Automated wafer defect inspection system using backside illumination | Physics | 2 | Expired |
| US9464992B2 | Automated wafer defect inspection system and a process of performing such inspection | Electricity | 2 | Active |
| US7111095B2 | Data transfer device with data frame grabber with switched fabric interface wherein data is distributed across network over virtual lane | Physics | 1 | Expired |
| US7822260B2 | Edge inspection | Physics | 1 | Active |
| US9337071B2 | Automated wafer defect inspection system and a process of performing such inspection | Electricity | 1 | Active |
| US7321108B2 | Dynamic focusing method and apparatus | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.