Mark W. Haley
6Patents
4h-index
5Co-inventors
42Inventor score
Filing activity: Nov 1, 1994 → Jun 1, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5953200A | Multiple pole electrostatic chuck with self healing mechanism for wafer clamping | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6355576B1 | Method for cleaning integrated circuit bonding pads | Emerging Cross-Sectional Technologies | 9 | Expired |
| US5917327A | Technique and apparatus for testing electrostatic chucks | Physics | 7 | Expired |
| US6690083B1 | Use of silicide blocking layer to create high valued resistor and diode for sub-1V bandgap | Electricity | 6 | Expired |
| US6306746A | Backend process for fuse link opening | Electricity | 3 | Expired |
| US5600236A | Converter and digital channel selector | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.