Mark Wiltse
6Patents
5h-index
20Co-inventors
59Inventor score
Filing activity: Oct 1, 1996 → Oct 19, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6537011B1 | Method and apparatus for transferring and supporting a substrate | Emerging Cross-Sectional Technologies | 33 | Expired |
| US5893643A | Apparatus for measuring pedestal temperature in a semiconductor wafer processing system | Electricity | 23 | Expired |
| US5851926A | Method for etching transistor gates using a hardmask | Electricity | 13 | Expired |
| US7901250B2 | Electrical adapter for a connector having a retention latch | Electricity | 12 | Active |
| US8104342B2 | Process condition measuring device | Emerging Cross-Sectional Technologies | 8 | Active |
| US7924408B2 | Temperature effects on overlay accuracy | Physics | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.