Masanobu Matsunaga
7Patents
5h-index
16Co-inventors
49Inventor score
Filing activity: Oct 7, 2008 → Nov 26, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8080290B2 | Film formation method and apparatus for semiconductor process | Electricity | 105 | Active |
| US8178448B2 | Film formation method and apparatus for semiconductor process | Electricity | 76 | Active |
| US8257789B2 | Film formation method in vertical batch CVD apparatus | Electricity | 75 | Active |
| US8298628B2 | Low temperature deposition of silicon-containing films | Electricity | 51 | Active |
| US8563096B2 | Vertical film formation apparatus and method for using same | Chemistry; Metallurgy | 31 | Active |
| US8216648B2 | Film formation method and apparatus | Electricity | 4 | Active |
| US8080477B2 | Film formation apparatus and method for using same | Electricity | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.