Mei Sun
43Patents
17h-index
34Co-inventors
81Inventor score
Filing activity: May 3, 1985 → Oct 28, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4986671A | Three-parameter optical fiber sensor and system | Physics | 492 | Expired |
| US6010538A | In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link | Physics | 127 | Expired |
| US4752141A | Fiberoptic sensing of temperature and/or other physical parameters | Physics | 99 | Expired |
| US4652143A | Optical temperature measurement techniques | Physics | 87 | Expired |
| US5107445A | Modular luminescence-based measuring system using fast digital signal processing | Physics | 64 | Expired |
| US6190040A | Apparatus for sensing temperature on a substrate in an integrated circuit fabrication tool | Physics | 62 | Expired |
| US6616332B1 | Optical techniques for measuring parameters such as temperature across a surface | Physics | 58 | Expired |
| US6325536A | Integrated wafer temperature sensors | Physics | 50 | Expired |
| US4789992A | Optical temperature measurement techniques | Physics | 43 | Expired |
| US7135852B2 | Integrated process condition sensing wafer and data analysis system | Electricity | 42 | Expired |
| US4988212A | Fiberoptic sensing of temperature and/or other physical parameters | Physics | 39 | Expired |
| US4859079A | Optical system using a luminescent material sensor for measuring very high temperatures | Physics | 38 | Expired |
| US4883354A | Fiberoptic sensing of temperature and/or other physical parameters | Physics | 35 | Expired |
| US5351268A | Modular luminescence-based measuring system using fast digital signal processing | Physics | 30 | Expired |
| US4626110A | Technique for optically measuring the temperature of an ultrasonically heated object | Physics | 27 | Expired |
| US5110216A | Fiberoptic techniques for measuring the magnitude of local microwave fields and power | Physics | 19 | Expired |
| US5414266A | Measuring system employing a luminescent sensor and methods of designing the system | Physics | 18 | Expired |
| US7855549B2 | Integrated process condition sensing wafer and data analysis system | Electricity | 16 | Active |
| US4785824A | Optical fiber probe for measuring the temperature of an ultrasonically heated object | Physics | 14 | Expired |
| US8033190B2 | Process condition sensing wafer and data analysis system | Emerging Cross-Sectional Technologies | 14 | Active |
| US6915589B2 | Sensor positioning systems and methods | Physics | 9 | Expired |
| US8104342B2 | Process condition measuring device | Emerging Cross-Sectional Technologies | 8 | Active |
| US5109595A | Method of making a fiberoptic sensor of a microwave field | Emerging Cross-Sectional Technologies | 8 | Expired |
| US10460966B2 | Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications | Electricity | 7 | Active |
| US7757574B2 | Process condition sensing wafer and data analysis system | Emerging Cross-Sectional Technologies | 7 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.