Michael DiBattista
10Patents
5h-index
15Co-inventors
59Inventor score
Filing activity: Aug 12, 1996 → Oct 21, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6825557B2 | Localized backside chip cooling with integrated smart valves | Electricity | 52 | Expired |
| US5731587A | Hot stage for scanning probe microscope | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6975184B2 | Adjusting the frequency of film bulk acoustic resonators | Electricity | 11 | Expired |
| US6355494B1 | Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing | Electricity | 10 | Expired |
| US8278220B2 | Method to direct pattern metals on a substrate | Electricity | 7 | Active |
| US6579732B2 | Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing | Electricity | 2 | Expired |
| US7232526B2 | Method and apparatus for controlling material removal from semiconductor substrate using induced current endpointing | Electricity | 2 | Expired |
| US6780658B2 | Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing | Electricity | 0 | Expired |
| US7183122B2 | Physical nano-machining with a scanning probe system for integrated circuit modification | Electricity | 0 | Expired |
| US8451009B2 | Techniques employing light-emitting circuits | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.