Michael Philip Roberts
9Patents
1h-index
23Co-inventors
40Inventor score
Filing activity: Jul 23, 2018 → Apr 28, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11236422B2 | Multi zone substrate support for ALD film property correction and tunability | Electricity | 3 | Active |
| US12209312B2 | Temperature control of a multi-zone pedestal | Electricity | 0 | Active |
| US12142509B2 | Electrostatic chuck with seal surface | Electricity | 0 | Active |
| US12400880B2 | Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber | Electricity | 0 | Active |
| US11535936B2 | Dual gas feed showerhead for deposition | Chemistry; Metallurgy | 0 | Active |
| US12186851B2 | Use of vacuum during transfer of substrates | Electricity | 0 | Active |
| US12110586B2 | Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers | Chemistry; Metallurgy | 0 | Active |
| US12071689B2 | Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes | Electricity | 0 | Active |
| US12308264B2 | Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.