Mukul Kelkar
10Patents
6h-index
16Co-inventors
63Inventor score
Filing activity: Oct 30, 1996 → Jan 4, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6039834A | Apparatus and methods for upgraded substrate processing system with microwave plasma source | Electricity | 177 | Expired |
| US6045618A | Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment | Emerging Cross-Sectional Technologies | 70 | Expired |
| US6079426A | Method and apparatus for determining the endpoint in a plasma cleaning process | Emerging Cross-Sectional Technologies | 67 | Expired |
| US6230652A | Apparatus and methods for upgraded substrate processing system with microwave plasma source | Electricity | 22 | Expired |
| US6361707B1 | Apparatus and methods for upgraded substrate processing system with microwave plasma source | Electricity | 21 | Expired |
| US6958658B2 | Circuit and method for generating a clock signal | Electricity | 7 | Expired |
| US7479777B2 | Circuitry and method to measure a duty cycle of a clock signal | Physics | 3 | Active |
| US6960950B2 | Circuit and method for generating a clock signal | Electricity | 2 | Expired |
| US7705620B2 | Measuring and identifying analog characteristics of a microelectronic component at a wafer level and a platform level | Physics | 0 | Active |
| US11011268B2 | System and method for managing medical waste received in one or more containers | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.