Inventor · Hsinchu, TW

Nigel P. Smith

35Patents
10h-index
32Co-inventors
75Inventor score

Filing activity: Sep 25, 1986 → Mar 29, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6361311B1 Low burning candle Chemistry; Metallurgy 47 Expired
US6555068B2 Apparatus incorporating air modifying agents Human Necessities 29 Expired
US6368564B1 Apparatus for incorporating air modifying agents Human Necessities 26 Expired
US7473502B1 Imaging tool calibration artifact and method Physics 25 Active
US7474401B2 Multi-layer alignment and overlay target and measurement method Physics 24 Active
US7379184B2 Overlay measurement target Electricity 18 Expired
US4737648A Apparatus for detecting fibrous particle sizes by detecting scattered light at different angles Physics 16 Expired
US7532317B2 Scatterometry method with characteristic signatures matching Electricity 11 Active
US7847939B2 Overlay measurement target Electricity 10 Active
US7477396B2 Methods and systems for determining overlay error based on target image symmetry Physics 10 Active
US7808643B2 Determining overlay error using an in-chip overlay target Electricity 7 Active
US8339605B2 Multilayer alignment and overlay target and measurement method Physics 7 Active
US8107079B2 Multi layer alignment and overlay target and measurement method Physics 6 Active
US6562294B1 Apparatus and method for disseminating an air modifying agent Human Necessities 5 Expired
US7876439B2 Multi layer alignment and overlay target and measurement method Physics 4 Active
US8674744B2 Electronic device and method for providing a digital signal at a level shifter output Electricity 3 Active
US10830709B2 Interferometer with pixelated phase shift mask Physics 3 Active
US9239523B2 Diffraction based overlay linearity testing Physics 2 Active
US7013498B1 Dispenser Fixed Constructions 2 Expired
US8390556B2 Level shifter for use in LCD display applications Physics 2 Active
US10935501B2 Sub-resolution defect detection Electricity 2 Active
US9564105B2 Programmable level shifter for LCD systems Physics 1 Active
US10774891B2 Electromechanical actuator Mechanical Engineering; Lighting; Heating 1 Active
US7619753B2 Method for measuring dimensions and optical system using the same Physics 1 Active
US10107621B2 Image based overlay measurement with finite gratings Physics 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.