Optical correction device

US8325322B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Markus Hauf · Ulm, DE
• Ulrich Schoenhoff · Ulm, DE
• Payam Tayebati · Ulm, DE
• Michael Thier · Heubach, DE
• Tilmann Heil · Aalen, DE
• Ole Fluegge · Heubach, DE
• Arif Kazi · Aalen, DE
• Alexander Sauerhoefer · Hamburg, DE
• Gerhard Focht · Wilmsdorf, DE
• Jochen Weber · Laufenbürg, DE
• Toralf Gruner · Hennef (Sieg), DE
• Aksel Goehnermeier · Aalen, DE
• Dirk Hellweg · Langenau, DE

Key dates

• Filing date: Feb 4, 2010
• Grant date: Dec 4, 2012
• Expiry date: Jan 21, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70891
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The disclosure relates to an optical correction device with thermal actuators for influencing the temperature distribution in the optical correction device. The optical correction device is constructed from at least two partial elements which differ with regard to their ability to transport heat. Furthermore, the disclosure relates to methods for influencing the temperature distribution in an optical element.