Paul Connors
9Patents
1h-index
34Co-inventors
43Inventor score
Filing activity: Mar 10, 2014 → Jul 29, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9355876B2 | Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations | Emerging Cross-Sectional Technologies | 434 | Active |
| US10679830B2 | Cleaning process for removing boron-carbon residuals in processing chamber at high temperature | Electricity | 1 | Active |
| US11031262B2 | Loadlock integrated bevel etcher system | Electricity | 0 | Active |
| US10950445B2 | Deposition of metal silicide layers on substrates and chamber components | Electricity | 0 | Active |
| US11315771B2 | Methods and apparatus for processing a substrate | Electricity | 0 | Active |
| US9490154B2 | Method of aligning substrate-scale mask with substrate | Electricity | 0 | Active |
| US10403515B2 | Loadlock integrated bevel etcher system | Electricity | 0 | Active |
| US10734232B2 | Deposition of metal silicide layers on substrates and chamber components | Electricity | 0 | Active |
| US10636684B2 | Loadlock integrated bevel etcher system | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.