Peter Smits
14Patents
5h-index
29Co-inventors
66Inventor score
Filing activity: Jan 22, 1985 → Sep 22, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7791709B2 | Substrate support and lithographic process | Physics | 9 | Active |
| US7583357B2 | Lithographic apparatus and device manufacturing method | Physics | 7 | Active |
| US7365827B2 | Lithographic apparatus and device manufacturing method | Physics | 7 | Expired |
| US4620034A | Process for the preparation of 2-keto-aldonic acids | Chemistry; Metallurgy | 6 | Expired |
| US7684010B2 | Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing | Physics | 6 | Expired |
| US8269949B2 | Lithographic apparatus and device manufacturing method | Physics | 5 | Active |
| US7633073B2 | Lithographic apparatus and device manufacturing method | Physics | 3 | Active |
| US7928407B2 | Lithographic apparatus and device manufacturing method | Physics | 2 | Active |
| US7755742B2 | Lithographic apparatus with mounted sensor | Physics | 2 | Expired |
| US8138486B2 | Lithographic apparatus and device manufacturing method | Physics | 1 | Active |
| US8115905B2 | Lithographic apparatus and device manufacturing method | Physics | 1 | Active |
| US8481978B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Active |
| US8390778B2 | Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing | Physics | 0 | Active |
| US8860926B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.