Ravikumar Patil
9Patents
1h-index
24Co-inventors
43Inventor score
Filing activity: Jan 10, 2018 → Jan 20, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10679827B2 | Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity | Electricity | 2 | Active |
| US11699571B2 | Semiconductor processing chambers for deposition and etch | Electricity | 1 | Active |
| US12400833B2 | Methods and apparatus for processing a substrate | Electricity | 0 | Active |
| US11887884B2 | Pre-loaded bowl mechanism for providing a symmetric radio frequency return path | Electricity | 0 | Active |
| US11664247B2 | Dynamic interface for providing a symmetric radio frequency return path | Electricity | 0 | Active |
| US11940819B1 | Mass flow controller based fast gas exchange | Emerging Cross-Sectional Technologies | 0 | Active |
| US12272591B2 | Friction stir welding in semiconductor manufacturing applications | Electricity | 0 | Active |
| US11881375B2 | Common substrate and shadow ring lift apparatus | Electricity | 0 | Active |
| US11887811B2 | Semiconductor processing chambers for deposition and etch | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.