Substrate gripper with integrated electrical contacts
US7780825B2 · kind B2 · utility
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20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 21, 2007 |
| Grant date | Aug 24, 2010 |
| Priority date | — |
| Expiry date | May 25, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53543
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate holding and transporting assembly is disclosed. The substrate holding and transporting assembly includes a base plate and a pair of clamps connected to the base plate in a spaced apart orientation, the spaced apart orientation of the pair of clamps enable support of a substrate with at least two independent points. The substrate holding and transporting assembly also includes an electrode assembly connected to the base plate at a location that is substantially between the pair of clamps. The electrode assembly defined to impart an electrical contact to the substrate when present and held by the pair of clamps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.