Substrate transfer shuttle
US6517303B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 20, 1998 |
| Grant date | Feb 11, 2003 |
| Priority date | — |
| Expiry date | May 20, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.