Roger Curtis
8Patents
3h-index
21Co-inventors
53Inventor score
Filing activity: Dec 19, 2007 → May 11, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8999106B2 | Apparatus and method for controlling edge performance in an inductively coupled plasma chamber | Electricity | 41 | Active |
| US8137463B2 | Dual zone gas injection nozzle | Electricity | 29 | Active |
| US10049881B2 | Method and apparatus for selective nitridation process | Electricity | 3 | Active |
| US8062472B2 | Method of correcting baseline skew by a novel motorized source coil assembly | Electricity | 2 | Active |
| US10950698B2 | Method and apparatus for selective nitridation process | Electricity | 0 | Active |
| US11885021B2 | Gas supply member with baffle | Electricity | 0 | Active |
| US11124878B2 | Gas supply member with baffle | Electricity | 0 | Active |
| US11581408B2 | Method and apparatus for selective nitridation process | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.