Ryou Son
5Patents
1h-index
19Co-inventors
44Inventor score
Filing activity: Oct 17, 2007 → Sep 10, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8080109B2 | Film formation apparatus and method for using the same | Emerging Cross-Sectional Technologies | 4 | Active |
| US9412565B2 | Temperature measuring method and plasma processing system | Physics | 1 | Active |
| US10504698B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US10971341B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US8183158B2 | Semiconductor processing apparatus and method for using same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.