Sanjay Thekdi
10Patents
5h-index
31Co-inventors
58Inventor score
Filing activity: Jun 15, 1999 → Dec 17, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6322716A | Method for conditioning a plasma etch chamber | Emerging Cross-Sectional Technologies | 194 | Expired |
| US6696365B2 | Process for in-situ etching a hardmask stack | Electricity | 16 | Expired |
| US6372634B1 | Plasma etch chemistry and method of improving etch control | Electricity | 15 | Expired |
| US6979652B2 | Etching multi-shaped openings in silicon | Electricity | 13 | Expired |
| US6697553B2 | Compact, low insertion loss, high yield arrayed waveguide grating | Physics | 5 | Expired |
| US7162108B2 | Planar lightwave circuit variable optical attenuator | Physics | 3 | Expired |
| US7261982B2 | Planar circuit optimization | Physics | 3 | Expired |
| US6905616B2 | Method of releasing devices from a substrate | Performing Operations; Transporting | 2 | Expired |
| US6947653B2 | Waveguide stress engineering and compatible passivation in planar lightwave circuits | Physics | 1 | Expired |
| US6979640B1 | Contact structure and method of making the same | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.