Satoshi Biwa
9Patents
2h-index
21Co-inventors
47Inventor score
Filing activity: Aug 12, 2009 → Feb 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10679845B2 | Substrate processing apparatus having cooling member | Electricity | 4 | Active |
| US10593571B2 | Substrate processing apparatus | Electricity | 2 | Active |
| US10619922B2 | Substrate processing apparatus, substrate processing method, and storage medium | Electricity | 1 | Active |
| US8671875B2 | Liquid processing apparatus, liquid processing method and storage medium | Electricity | 1 | Active |
| US10381246B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US10276425B2 | Substrate processing system | Electricity | 0 | Active |
| US11295965B2 | Cleaning apparatus and cleaning method of substrate processing apparatus | Performing Operations; Transporting | 0 | Active |
| US12057327B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US11557492B2 | Substrate processing apparatus and control method thereof | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.