Inventor · Rifu, JP

Satoshi Taga

15Patents
2h-index
12Co-inventors
47Inventor score

Filing activity: Feb 19, 2008 → Oct 17, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9404180B2 Deposition device Electricity 4 Active
US10557190B2 Substrate processing apparatus and susceptor Electricity 3 Active
US9202728B2 Substrate mounting mechanism, and substrate processing apparatus Electricity 1 Active
US9976217B2 Film forming method using reversible decomposition reaction Electricity 1 Active
US8992686B2 Mounting table structure, film forming apparatus and raw material recovery method Electricity 1 Active
US8277889B2 Film formation method and film formation apparatus Electricity 1 Active
US9587300B2 Electrode manufacturing apparatus for lithium ion capacitor and electrode manufacturing method therefor Emerging Cross-Sectional Technologies 0 Active
US8273409B2 Method for film formation, apparatus for film formation, and computer-readable recording medium Electricity 0 Active
US11676847B2 Substrate placing table and substrate processing apparatus Electricity 0 Active
US11508603B2 Substrate placing table and substrate processing apparatus Electricity 0 Active
US11217470B2 Substrate placing table and substrate processing apparatus Electricity 0 Active
US9062374B2 Method for film formation, apparatus for film formation, and computer-readable recording medium Electricity 0 Active
US10941477B2 Substrate processing apparatus and susceptor Electricity 0 Active
US11227786B2 Method of manufacturing electrostatic chuck and electrostsatic chuck Electricity 0 Active
US9777362B2 Electrode manufacturing apparatus for lithium ion capacitor Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.