Satoshi Taga
15Patents
2h-index
12Co-inventors
47Inventor score
Filing activity: Feb 19, 2008 → Oct 17, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9404180B2 | Deposition device | Electricity | 4 | Active |
| US10557190B2 | Substrate processing apparatus and susceptor | Electricity | 3 | Active |
| US9202728B2 | Substrate mounting mechanism, and substrate processing apparatus | Electricity | 1 | Active |
| US9976217B2 | Film forming method using reversible decomposition reaction | Electricity | 1 | Active |
| US8992686B2 | Mounting table structure, film forming apparatus and raw material recovery method | Electricity | 1 | Active |
| US8277889B2 | Film formation method and film formation apparatus | Electricity | 1 | Active |
| US9587300B2 | Electrode manufacturing apparatus for lithium ion capacitor and electrode manufacturing method therefor | Emerging Cross-Sectional Technologies | 0 | Active |
| US8273409B2 | Method for film formation, apparatus for film formation, and computer-readable recording medium | Electricity | 0 | Active |
| US11676847B2 | Substrate placing table and substrate processing apparatus | Electricity | 0 | Active |
| US11508603B2 | Substrate placing table and substrate processing apparatus | Electricity | 0 | Active |
| US11217470B2 | Substrate placing table and substrate processing apparatus | Electricity | 0 | Active |
| US9062374B2 | Method for film formation, apparatus for film formation, and computer-readable recording medium | Electricity | 0 | Active |
| US10941477B2 | Substrate processing apparatus and susceptor | Electricity | 0 | Active |
| US11227786B2 | Method of manufacturing electrostatic chuck and electrostsatic chuck | Electricity | 0 | Active |
| US9777362B2 | Electrode manufacturing apparatus for lithium ion capacitor | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.