Inventor · Tokyo, JP

Satoshi Une

7Patents
1h-index
16Co-inventors
44Inventor score

Filing activity: May 5, 2009 → Apr 11, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7909933B2 Plasma processing method Electricity 1 Active
US10229838B2 Plasma etching method Electricity 0 Active
US11424106B2 Plasma processing apparatus Electricity 0 Active
US8277563B2 Plasma processing method Electricity 0 Active
US11658040B2 Plasma processing method Electricity 0 Active
US12374532B2 Plasma processing method Electricity 0 Active
US8143175B2 Dry etching method Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.