Sei NEGORO
18Patents
2h-index
28Co-inventors
50Inventor score
Filing activity: Feb 26, 2013 → Jun 27, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8877076B2 | Substrate treatment apparatus and substrate treatment method | Chemistry; Metallurgy | 3 | Active |
| US10861718B2 | Substrate processing method and substrate processing apparatus | Electricity | 2 | Active |
| US10032654B2 | Substrate treatment apparatus | Chemistry; Metallurgy | 2 | Active |
| US10464107B2 | Substrate processing method and substrate processing apparatus | Electricity | 1 | Active |
| US9403187B2 | Substrate processing method and substrate processing apparatus | Electricity | 1 | Active |
| US12042813B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US12269980B2 | Silicon etching solution and method for producing silicon device using the etching solution | Electricity | 0 | Active |
| US10814251B2 | Substrate processing method and substrate processing apparatus | Performing Operations; Transporting | 0 | Active |
| US11439967B2 | Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device | Performing Operations; Transporting | 0 | Active |
| US11670517B2 | Substrate processing method and substrate processing device | Electricity | 0 | Active |
| US9555452B2 | Substrate treatment method and substrate treatment apparatus | Performing Operations; Transporting | 0 | Active |
| US12334366B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US12064739B2 | Chemical liquid preparation device, and substrate processing device | Performing Operations; Transporting | 0 | Active |
| US12337289B2 | Chemical liquid preparation device, and substrate processing device | Performing Operations; Transporting | 0 | Active |
| US11222795B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US12327737B2 | Substrate treating apparatus | Electricity | 0 | Active |
| US11466206B2 | Silicon etching solution and method for producing silicon device using the etching solution | Electricity | 0 | Active |
| US9340761B2 | Substrate processing method and substrate processing apparatus | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.