Sergey Babin
8Patents
5h-index
13Co-inventors
56Inventor score
Filing activity: Jan 28, 1997 → Mar 14, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5847959A | Method and apparatus for run-time correction of proximity effects in pattern generation | Emerging Cross-Sectional Technologies | 119 | Expired |
| US6720565B2 | Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithography | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6373071B1 | Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography | Electricity | 20 | Expired |
| US6420717B1 | Method and apparatus for real-time correction of resist heating in lithography | Electricity | 8 | Expired |
| US6455863B1 | Apparatus and method for forming a charged particle beam of arbitrary shape | Electricity | 7 | Expired |
| US6326635A | Minimization of electron fogging in electron beam lithography | Electricity | 4 | Expired |
| US7786403B2 | Method for high-resolution processing of thin layers using electron beams | Electricity | 3 | Active |
| US9964453B2 | Device and method for high precision fiber-optic temperature profile measurements in long length areas | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.