Shaofeng Chen
6Patents
1h-index
31Co-inventors
51Inventor score
Filing activity: Dec 6, 2001 → Jan 13, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6623605B2 | Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck | Emerging Cross-Sectional Technologies | 1 | Expired |
| US8339131B2 | Electric field sensor with electrode interleaving vibration | Physics | 1 | Active |
| US11555250B2 | Organic contamination free surface machining | Electricity | 1 | Active |
| US11302520B2 | Chamber apparatus for chemical etching of dielectric materials | Electricity | 0 | Active |
| US10982242B2 | Coordinated-control coenzyme Q10 fermentation production process based on online oxygen consumption rate and electrical conductivity | Chemistry; Metallurgy | 0 | Active |
| US11932950B2 | Organic contamination free surface machining | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.