Organic contamination free surface machining

US11555250B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Yuanhong Guo · San Jose, US
• Sheng Guo · San Mateo, US
• Marek Radko · Santa Clara, US
• Steven V. Sansoni · Livermore, US
• Nagendra Madiwal · Bengaluru, IN
• Matvey Farber · Redwood City, US
• Pingping Gou · Foster City, US
• Song-Moon Suh · San Jose, US
• Jeffrey C. Hudgens · San Francisco, US
• Yuji Murayama · Los Gatos, US
• Anurag Bansal · Fremont, US
• Shaofeng Chen · Austin, US
• Michael Kuchar · Georgetown, US

Key dates

• Filing date: Apr 27, 2021
• Grant date: Jan 17, 2023
• Expiry date: Apr 27, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67184
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method includes receiving a metal component including a raw surface that includes a metal base, a first native oxide disposed on the metal base, and hydrocarbons disposed on the metal base. The method further includes machining the raw surface of the metal component to remove the first native oxide and a first portion of the hydrocarbons from the metal base. The machining generates an as-machined surface of the metal component including the metal base without the first native oxide and without the first portion of the hydrocarbons. The method further includes performing a surface machining of the as-machined surface of the metal component to remove a second portion of the hydrocarbons. The method further includes surface treating the metal component to remove a third portion of the hydrocarbons. The method further includes performing a cleaning of the metal component and drying the metal component.