Organic contamination free surface machining

US11932950B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Yuanhong Guo · San Jose, US
• Sheng Guo · San Mateo, US
• Marek Radko · Santa Clara, US
• Steven V. Sansoni · Livermore, US
• Nagendra Madiwal · Bengaluru, IN
• Matvey Farber · Redwood City, US
• Pingping Gou · Foster City, US
• Song-Moon Suh · San Jose, US
• Jeffrey C. Hudgens · San Francisco, US
• Yuji Murayama · Los Gatos, US
• Anurag Bansal · Fremont, US
• Shaofeng Chen · Austin, US
• Michael Kuchar · Georgetown, US

Key dates

• Filing date: Jan 13, 2023
• Grant date: Mar 19, 2024
• Expiry date: Jan 13, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67184
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method includes machining a raw surface of a metal component to remove first native oxide from a metal base of the metal component to generate an as-machined surface of the metal component. A second native oxide is formed on the metal base of the as-machined surface of the metal component subsequent to the machining. The method further includes, subsequent to the machining, performing operations to generate a finished surface of the metal component. The operations include a surface machining of the as-machined surface of the metal component to remove the second native oxide.