Shigeaki Kishida
7Patents
2h-index
12Co-inventors
48Inventor score
Filing activity: Nov 24, 1998 → Jul 10, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6051120A | Thin film forming apparatus | Electricity | 3 | Expired |
| US7988835B2 | Silicon dot forming method and silicon dot forming apparatus | Electricity | 2 | Active |
| US11251020B2 | Sputtering apparatus | Electricity | 0 | Active |
| US11862431B2 | Plasma control system and plasma control program | Electricity | 0 | Active |
| US11328913B2 | Sputtering device | Electricity | 0 | Active |
| US11289314B2 | Sputtering device | General | 0 | Revoked |
| US11417752B2 | Method for producing thin film transistor | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.