Shigeru Kawamura
7Patents
3h-index
8Co-inventors
50Inventor score
Filing activity: Jan 14, 1983 → Jul 26, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6800546B2 | Film forming method by radiating a plasma on a surface of a low dielectric constant film | Electricity | 16 | Expired |
| US6528108B1 | Method and apparatus for observing porous amorphous film, and method and apparatus for forming the same | Physics | 13 | Expired |
| US4481483A | Low distortion amplifier circuit | Electricity | 6 | Expired |
| US6407404B1 | Apparatus for the examining defect of monolithic substrate and method for examining the same | Physics | 2 | Expired |
| US8647440B2 | Substrate processing method and substrate processing apparatus | Electricity | 2 | Active |
| US8945412B2 | Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US7923680B2 | Analysis method and analysis apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.