Shigeru Odake
6Patents
2h-index
10Co-inventors
48Inventor score
Filing activity: Feb 11, 2000 → Feb 3, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6251189A | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 22 | Expired |
| US10950457B2 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Electricity | 3 | Active |
| US10811271B2 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Electricity | 2 | Active |
| US9966289B2 | Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium | Electricity | 1 | Active |
| US12062546B2 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Electricity | 0 | Active |
| US10403528B2 | Substrate-processing apparatus and method of manufacturing semiconductor device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.