Soichi Isobe
18Patents
5h-index
39Co-inventors
66Inventor score
Filing activity: Feb 25, 1993 → Jun 27, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5716036A | Mounting structure for mounting a polygon mirror | Physics | 35 | Expired |
| US7063598B2 | Substrate delivery mechanism | Electricity | 11 | Expired |
| US8382558B2 | Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method | Performing Operations; Transporting | 9 | Active |
| US6783445B2 | Polishing apparatus | Performing Operations; Transporting | 8 | Expired |
| US5373391A | Polygon mirror with embedded yoke | Physics | 6 | Expired |
| US6746312B2 | Polishing method and polishing apparatus | Performing Operations; Transporting | 4 | Expired |
| US7645185B2 | Substrate delivery mechanism | Electricity | 4 | Active |
| US6783427B2 | Polishing system with air exhaust system | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7083506B2 | Polishing apparatus | Performing Operations; Transporting | 4 | Expired |
| US9144881B2 | Polishing apparatus and polishing method | Electricity | 3 | Active |
| US5598291A | Polygon mirror mounting structure | Physics | 3 | Expired |
| US10688622B2 | Substrate processing apparatus | Electricity | 2 | Active |
| US8298369B2 | Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid | Performing Operations; Transporting | 1 | Active |
| US7160180B2 | Substrate delivery mechanism | Electricity | 1 | Expired |
| US11541502B2 | Substrate processing apparatus | Performing Operations; Transporting | 0 | Active |
| US9842732B2 | Substrate cleaning apparatus and substrate cleaning method | Electricity | 0 | Active |
| US9704728B2 | Substrate cleaning apparatus and substrate cleaning method | Electricity | 0 | Active |
| US12358098B2 | Liquid feeder and polishing apparatus | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.