Stephen K. Loh
6Patents
4h-index
13Co-inventors
46Inventor score
Filing activity: Sep 23, 1997 → Nov 5, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5998253A | Method of forming a dopant outdiffusion control structure including selectively grown silicon nitride in a trench capacitor of a DRAM cell | Electricity | 33 | Expired |
| US6057220A | Titanium polycide stabilization with a porous barrier | Electricity | 26 | Expired |
| US6228701A | Apparatus and method for minimizing diffusion in stacked capacitors formed on silicon plugs | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6639264B1 | Method and structure for surface state passivation to improve yield and reliability of integrated circuit structures | Electricity | 11 | Expired |
| US7101817B2 | System and method for determining line widths of free-standing structures resulting from a semiconductor manufacturing process | Electricity | 0 | Expired |
| US7361584B2 | Detection of residual liner materials after polishing in damascene process | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.