Steven Gianoulakis
10Patents
5h-index
12Co-inventors
55Inventor score
Filing activity: Aug 24, 1998 → Jun 13, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6793733B2 | Gas distribution showerhead | Chemistry; Metallurgy | 81 | Expired |
| US7452827B2 | Gas distribution showerhead featuring exhaust apertures | Chemistry; Metallurgy | 25 | Active |
| US6309461A | Crystal growth and annealing method and apparatus | Emerging Cross-Sectional Technologies | 24 | Expired |
| US7722719B2 | Gas baffle and distributor for semiconductor processing chamber | Electricity | 14 | Expired |
| US6350310B1 | Crystal growth and annealing for minimized residual stress | Chemistry; Metallurgy | 6 | Expired |
| US6825448B2 | Low residual-stress brazed terminal for heater | Electricity | 5 | Expired |
| US6316150A | Low thermal distortion extreme-UV lithography reticle | Physics | 4 | Expired |
| US6684523B2 | Particle removal apparatus | Electricity | 4 | Expired |
| US6395455B2 | Low thermal distortion Extreme-UV lithography reticle and method | Physics | 3 | Expired |
| US6441885B2 | Low thermal distortion extreme-UV lithography reticle | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.