Thomas E. Sandwick
5Patents
5h-index
21Co-inventors
55Inventor score
Filing activity: Feb 26, 1992 → Jul 10, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5262354A | Refractory metal capped low resistivity metal conductor lines and vias | Electricity | 162 | Expired |
| US6020264A | Method and apparatus for in-line oxide thickness determination in chemical-mechanical polishing | Electricity | 62 | Expired |
| US5640242A | Assembly and method for making in process thin film thickness measurments | Physics | 56 | Expired |
| US5935869A | Method of planarizing semiconductor wafers | Chemistry; Metallurgy | 10 | Expired |
| US5897425A | Vertical polishing tool and method | Performing Operations; Transporting | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.