Troy S. Detrick
10Patents
7h-index
33Co-inventors
62Inventor score
Filing activity: May 29, 1997 → Sep 19, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6182602A | Inductively coupled HDP-CVD reactor | Electricity | 304 | Expired |
| US6083344A | Multi-zone RF inductively coupled source configuration | Electricity | 287 | Expired |
| US7968469B2 | Method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity | Electricity | 39 | Active |
| US7988815B2 | Plasma reactor with reduced electrical skew using electrical bypass elements | Electricity | 8 | Active |
| US7879731B2 | Improving plasma process uniformity across a wafer by apportioning power among plural VHF sources | Electricity | 7 | Active |
| US7838430B2 | Plasma control using dual cathode frequency mixing | Electricity | 7 | Active |
| US8076247B2 | Plasma process uniformity across a wafer by controlling RF phase between opposing electrodes | Electricity | 7 | Active |
| US8080479B2 | Plasma process uniformity across a wafer by controlling a variable frequency coupled to a harmonic resonator | Electricity | 5 | Active |
| US7884025B2 | Plasma process uniformity across a wafer by apportioning ground return path impedances among plural VHF sources | Electricity | 2 | Active |
| US8878926B2 | Apparatus and method for analyzing thermal properties of composite structures | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.