Tung J. Chuang
4Patents
3h-index
6Co-inventors
36Inventor score
Filing activity: Jun 25, 1981 → Jan 24, 1984
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4478677A | Laser induced dry etching of vias in glass with non-contact masking | Performing Operations; Transporting | 57 | Expired |
| US4490210A | Laser induced dry chemical etching of metals | Chemistry; Metallurgy | 32 | Expired |
| US4331504A | Etching process with vibrationally excited SF.sub.6 | Electricity | 15 | Expired |
| US4617086A | Rapid etching method for silicon by SF.sub.6 gas | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.