Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
US5392018A · kind A · utility
61Cited by
13References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 12, 1992 |
| Grant date | Feb 21, 1995 |
| Priority date | — |
| Expiry date | Nov 12, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01F2029/143
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The disclosure discusses impedance matching circuits based on parallel-resonant L-C tank circuits, and describes a low-loss design for an adjustable inductance element suitable for use in these parallel tank circuits. The application of an impedance matching circuit to a plasma process is also disclosed; in this context, a local impedance transformation circuit is used to improve power transfer to the plasma source antenna.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.