Inventor · Rotterdam, NY, US

Wayne Fitzgerald

7Patents
1h-index
14Co-inventors
48Inventor score

Filing activity: Aug 25, 1998 → Aug 20, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US5888050A Precision high pressure control assembly Mechanical Engineering; Lighting; Heating 54 Expired
US11126096B2 System and method for optimizing a lithography exposure process Physics 1 Active
US10466179B2 Semiconductor device inspection of metallic discontinuities Physics 0 Active
US10528961B2 System and method for estimating a move using object measurements Physics 0 Active
US11315832B2 Wafer singulation process control Physics 0 Active
US10553504B2 Inspection of substrates Physics 0 Active
US11531279B2 System and method for optimizing a lithography exposure process Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.