Won-Yong Koh
10Patents
5h-index
10Co-inventors
59Inventor score
Filing activity: May 29, 1998 → May 5, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6720262B2 | Method of forming copper interconnections and thin films using chemical vapor deposition with catalyst | Electricity | 297 | Expired |
| US7141278B2 | Thin film forming method | Electricity | 111 | Expired |
| US7485349B2 | Thin film forming method | Electricity | 11 | Active |
| US5922405A | Process for the preparation of aluminum oxide film using dialkylaluminum alkoxide | Chemistry; Metallurgy | 7 | Expired |
| US5998644A | Volatile organometallic compound containing a divalent metal and a group 13 metal, process for preparing same, and process for preparing a heterometallic oxide film using same | Chemistry; Metallurgy | 5 | Expired |
| US6426117B1 | Method for forming a three-component nitride film containing metal and silicon | Electricity | 4 | Expired |
| US6063951A | Volatile magnesium alkylaluminum alkoxide and deposition of magnesium aluminate film using same | Chemistry; Metallurgy | 3 | Expired |
| US6409830B1 | Process for preparing a limo2 type heterometallic oxide film | Chemistry; Metallurgy | 1 | Expired |
| US10290493B2 | Method for manufacturing silicon-containing thin film | Electricity | 0 | Active |
| US6156916A | Volatile organometallic compound containing a divalent metal and a group 13 metal, process for preparing same, and process for preparing a heterometallic oxide film using same | Chemistry; Metallurgy | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.