Inventor · Cedar Park, TX, US

Xiaoming Lu

24Patents
5h-index
48Co-inventors
65Inventor score

Filing activity: Apr 18, 2005 → Dec 19, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US7635445B2 Method of separating a mold from a solidified layer disposed on a substrate Emerging Cross-Sectional Technologies 23 Active
US8652393B2 Strain and kinetics control during separation phase of imprint process Physics 13 Active
US9090014B2 High throughput imprint based on contact line motion tracking control Performing Operations; Transporting 7 Active
US8945444B2 High throughput imprint based on contact line motion tracking control Performing Operations; Transporting 7 Active
US8880873B2 Method, system and device for authenticating cardless terminal using application server Electricity 5 Active
US10335984B2 Imprint apparatus and article manufacturing method Performing Operations; Transporting 2 Active
US10444624B1 Active metrology frame and thermal frame temperature control in imprint lithography Physics 2 Active
US10248018B2 Imprint apparatus and method of manufacturing article Physics 1 Active
US11614693B2 Method of determining the initial contact point for partial fields and method of shaping a surface Physics 1 Active
US8959343B2 Authentication system, method and device Electricity 0 Active
US8984270B2 Data file decryption method, decryption device and data broadcasting system Electricity 0 Active
US11823963B2 Planarization apparatus, planarization process, and method of manufacturing an article General 0 Revoked
US10199244B2 Imprint apparatus, and method of manufacturing article Electricity 0 Active
US12015628B1 Complex network attack detection method based on cross-host abnormal behavior recognition Electricity 0 Active
US11994797B2 System and method for shaping a film with a scaled calibration measurement parameter Physics 0 Active
US10409178B2 Alignment control in nanoimprint lithography based on real-time system identification Physics 0 Active
US10654216B2 System and methods for nanoimprint lithography Electricity 0 Active
US11587795B2 Planarization apparatus including superstrate chuck with bendable periphery Electricity 0 Active
US9996147B2 High temperature and high humidity testing device and high temperature and high humidity testing system Physics 0 Active
US10597840B2 Hot-melt anchor head Fixed Constructions 0 Active
US12282251B2 Method of shaping a surface, shaping system, and method of manufacturing an article Electricity 0 Active
US12027373B2 Planarization process, planarization system, and method of manufacturing an article Electricity 0 Active
US11869813B2 Planarization apparatus, planarization process, and method of manufacturing an article Electricity 0 Active
US11161280B2 Strain and kinetics control during separation phase of imprint process Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.