Ya-Ming Chen
5Patents
0h-index
13Co-inventors
28Inventor score
Filing activity: Nov 12, 2021 → Jun 15, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12341009B2 | Variable hardness amorphous carbon mask | Electricity | 0 | Active |
| US12300468B2 | Method of uniformity control | Electricity | 0 | Active |
| US12040176B2 | Technologies for high aspect ratio carbon etching with inserted charge dissipation layer | Electricity | 0 | Active |
| US12217935B2 | Plasma processing methods using multiphase multifrequency bias pulses | Electricity | 0 | Active |
| US12009211B2 | Method for highly anisotropic etching of titanium oxide spacer using selective top-deposition | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.