Ying Yu
5Patents
4h-index
10Co-inventors
43Inventor score
Filing activity: Jul 11, 1997 → Apr 19, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6586343B1 | Method and apparatus for directing constituents through a processing chamber | Emerging Cross-Sectional Technologies | 56 | Expired |
| US6645884B1 | Method of forming a silicon nitride layer on a substrate | Chemistry; Metallurgy | 36 | Expired |
| US6436192B1 | Apparatus for aligning a wafer | Electricity | 11 | Expired |
| US6063440A | Method for aligning a wafer | Electricity | 11 | Expired |
| US6820298B2 | Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint | Emerging Cross-Sectional Technologies | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.