Yosuke Kawabuchi
14Patents
2h-index
43Co-inventors
46Inventor score
Filing activity: Oct 12, 2010 → Jan 28, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8475668B2 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein | Electricity | 3 | Active |
| US10395950B2 | Substrate processing apparatus, substrate processing method, and recording medium | Electricity | 3 | Active |
| US10692739B2 | Substrate processing apparatus | Electricity | 2 | Active |
| US10950465B2 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Chemistry; Metallurgy | 2 | Active |
| US10504718B2 | Substrate processing apparatus, substrate processing method, and storage medium | Electricity | 2 | Active |
| US9362106B2 | Substrate processing method, substrate processing apparatus, and storage medium | Electricity | 1 | Active |
| US9321085B2 | Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US10192758B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US10727042B2 | Liquid processing method, substrate processing apparatus and recording medium | Performing Operations; Transporting | 0 | Active |
| US10867814B2 | Liquid processing method, substrate processing apparatus, and storage medium | Electricity | 0 | Active |
| US8906165B2 | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus | Electricity | 0 | Active |
| US8545640B2 | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus | Electricity | 0 | Active |
| US11854815B2 | Substrate drying apparatus, substrate drying method and storage medium | Electricity | 0 | Active |
| US9805957B2 | Substrate processing apparatus, substrate processing method and computer-readable storage medium recording therein substrate processing program | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.